[H2-PR18] Slot 18

[H2-PR18-08] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

*Kohei Abe¹, Akihiro Yamamoto¹, Iori Nagao¹, Michihiro Otaka¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University. (Japan), 2. National Institutes of Natural Sciences (Japan))

キーワード：Plasma CVD, CCP, Simulation, PIC/MCC, IEDF