Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma

Yang Tao

Presentation information

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PR18] Slot 18

Thu. Dec 16, 2021 6:30 PM - 8:30 PM H2-PR18 (G403-404)

6:30 PM - 8:30 PM

[H2-PR18-18] Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma

*Yang Tao¹, Daiki Nagamatsu¹, Kunihiro Kamataki¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. NINS. (Japan))

Keywords:radial and vertical electric field, capacitively coupled plasma, electro-optic sensors

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