[H2-PV23] Slot 23

[H2-PV23-01] Preparation of elemental gradient functional thin films by using mixture powder targets

*Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yoshiaki Suda², Yusuke Hibino¹ (1. Nat. Ins. Tech., Sasebo Col. (Japan), 2. Nat. Ins. Tech., Ishikawa Col. (Japan))