Materials Research Meeting 2021

Presentation information

Oral Session

H. Innovative Materials Processing for Sustainable Society » [H-4] Smart Laser Processing for Green Technologies

[H4-O7] Slot 07

Wed. Dec 15, 2021 2:30 PM - 6:00 PM Room S (G320)

Chair: Nilesh J. Vasa (Indian Institute of Technology Madras), Siti Rahmah Aid (Universiti Teknologi Malaysia)

4:00 PM - 4:20 PM

[H4-O7-05] Size-Controlled Square-Grain Formation of Poly-Si Films Crystallized by Laser Annealing with Intensity Distribution, and Electrical Properties of the Poly-Si TFTs

*Toru Okatsugi1, Takahiro Nagano1, Akira Mizutani2, Keita Katayama1, Daisuke Nakamura1, Hiroshi Ikenoue1,2, Tetsuya goto3 (1. Graduate School of Information Science and Electrical Engineering, Kyushu Univ. (Japan), 2. Department of Gigaphoton Next GLP, Kyushu Univ (Japan), 3. New Industry Creation Hatchery Center, Tohoku Unive (Japan))

Keywords:Low-temperature poly-Si, Thin-film transistor, Excimer laser annealing

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