[A5-P501] Poster 501

[A5-P501-07] Molecular Dynamics Study on HF Etching of amorphous Si₃N₄ with Neural Network Potential

*Changho Hong¹, Sangmin Oh¹, Seungwu Han¹ (1. Seoul National Univ. (Korea))

Keywords:Neural network potential, Surface-plasma interaction, Chemical sputtering, DFT