[A5-P501] Poster 501

[A5-P501-08] Atomistic study of TaN_x-Cu Interfaces using Neural Network Interatomic Potentials

*JeongMin Choi¹, Jaehoon Kim¹, Seungwu Han¹ (1. Seoul National Univ. (Korea))

Keywords:Interface energy, Interconnect system, Neural network potential, Computational study, DFT