Electrical properties of Ge-doped α-Ga<sub>2</sub>O<sub>3</sub> films prepared by mist-CVD method

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Wed. Dec 13, 2023 10:00 AM - 12:00 PM Session 11 (Room B-2)

Chair: Valentin Craciun (Department of Lasers, National Institute for Laser, Plasma and Radiation Physics), Tsukasa Katayama (Hokkaido University)

11:30 AM - 11:45 AM

*Takeru Wakamatsu¹, Yuki Isobe¹, Hitoshi Takane¹, Kentaro Kaneko², Katsuhisa Tanaka¹ (1. Kyoto Univ. (Japan), 2. Ritsumeikan Univ. (Japan))

Keywords:Gallium oxide, Power electronics, Mist-CVD, Germanium

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