MRM2023/IUMRS-ICA2023

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Oral Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

[G1-O403] Oral 403

Thu. Dec 14, 2023 4:30 PM - 6:30 PM Session 13 (Room I)

Chair: R. Mohan Sankaran (University of Illinois Urbana-Champaign)

4:30 PM - 5:00 PM

[G1-O403-01 (Symposium Invited)] Mechanism of prior light emission of arcing generated in a capacitively coupled plasma with multi-diagnostic methods

*Shinjae You1, Sijun Kim1, Chulhee Cho1, Daewoong Kim2 (1. Chungnam National Univ. (Korea), 2. Korea Inst. of Machinery and Materials (Korea))

Keywords:Arcing, Arcing in plasma, Arcing mechanism, Prior light emission

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