Mechanism of prior light emission of arcing generated in a capacitively coupled plasma with multi-diagnostic methods

16:30 〜 17:00

[G1-O403-01 (Symposium Invited)] Mechanism of prior light emission of arcing generated in a capacitively coupled plasma with multi-diagnostic methods

*Shinjae You¹, Sijun Kim¹, Chulhee Cho¹, Daewoong Kim² (1. Chungnam National Univ. (Korea), 2. Korea Inst. of Machinery and Materials (Korea))

キーワード：Arcing, Arcing in plasma, Arcing mechanism, Prior light emission

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