MRM2023/IUMRS-ICA2023

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Poster Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

[G1-P501] Poster 501

Fri. Dec 15, 2023 10:00 AM - 12:00 PM Poster (Annex)

[G1-P501-05] Microstructure and Magnetic Properties of FeCoNiCuxPtx High Entropy Alloy Films

*Boya Li1, Weikai Luo1, Takashi Harumoto1 (1. Tokyo Inst. of Tech. (Japan))

Keywords:Magnetron sputtering, Magnetic thin films, Heat treatment, Multilayer film , DFT calculation

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