[G1-P501] Poster 501

[G1-P501-10] Investigation of the number of fitting bands for Raman spectroscopy in DLC films - using AC HV methane plasma CVD method as an example -

*Yuichi Imai^1,2, Hiroyuki Fukue², Kazuma Tanaka², Tatsuyuki Nakatani², Shinsuke Kunitsugu³, Susumu Takabayashi⁴ (1. STRAWB Inc. (Japan), 2. Okayama University of Science (Japan), 3. Ind. Technol. Cent. Okayama Pref. (Japan), 4. National Inst. Technol., Ariake College (Japan))

Keywords:Raman spectroscopy, DLC, AC HV methane plasma CVD, plasma process