[G1-P501] Poster 501

[G1-P501-10] Investigation of the number of fitting bands for Raman spectroscopy in DLC films - using AC HV methane plasma CVD method as an example -

*Yuichi Imai^1,2, Hiroyuki Fukue², Kazuma Tanaka², Tatsuyuki Nakatani², Shinsuke Kunitsugu³, Susumu Takabayashi⁴ (1. STRAWB Inc. (Japan), 2. Okayama University of Science (Japan), 3. Ind. Technol. Cent. Okayama Pref. (Japan), 4. National Inst. Technol., Ariake College (Japan))

キーワード：Raman spectroscopy, DLC, AC HV methane plasma CVD, plasma process