MRM2023/IUMRS-ICA2023

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Poster Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[S2-P304-22] Study of Crystallization Mechanism of Amorphous WO3 Films Deposited by RF Sputtering

*Ayaka Fukuchi1, Junjun Jia2, Risa Nakamura1, Eisuke Magome3, Tetsuaki Nishida4, Nobuto Oka1 (1. Kindai Univ. (Japan), 2. Waseda Univ. (Japan), 3. SAGA Light Source (Japan), 4. Environmental Materials Inst. (Japan))

Keywords:Sputtering, Tungsten Oxide, Crystallization Mechanism

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