MRM2023/IUMRS-ICA2023

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Poster Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[S2-P304-23] Study of the Crystallization Mechanism of Amorphous Ga2O3 Films Deposited by RF Sputtering

*Risa Nakamura1, Junjun Jia2, Ayaka Fukuchi1, Eisuke Magome3, Tetsuaki Nishida4, Nobuto Oka1 (1. Kindai Univ. (Japan), 2. Waseda Univ. (Japan), 3. SAGA Light Source (Japan), 4. Environmental Materials Inst. (Japan))

Keywords:RF sputtering, Crystallization mechanism, Gallium oxide

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