[ME1] Silicon Nitride and Novel Material Waveguides

[ME1-2] A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss

〇Philippe Helin, Andrea Firrincieli, Ashesh Ray Chaudhuri, Nga Pham, Silvia Lenci, Manuel Mannarino, Haris Osman (Imec, Belgium)

キーワード：Advanced Passive Devices, Planar lightwave circuits (PLC)

This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of layer thickness control; 1nm for a silicon nitride thickness of 400nm with low propagation loss 0.13dB/cm at 1520nm.