[ME1] Silicon Nitride and Novel Material Waveguides

[ME1-3] Optical Properties of A Silicon-Rich Nitride Ridge Waveguide at 2 μm Wavelengths

〇Zhihua Tu¹, Taoce Yin¹, Lars H. Frandsen², Daru Chen³, Shiming Gao¹, Xiaowei Guan² (¹Zhejiang Univ., China, ²Technical Univ. of Denmark, Denmark, ³Zhejiang Normal Univ., China)

Keywords:Optical signal processing techniques for optical communications, Photonic integrated circuits, Novel Materials and Structures

A silicon-rich nitride (SRN) ridge waveguide is fabricated and measured to exhibit a low loss of ~2 dB/cm and a nonlinear parameter γ of 1.47 W^-1 m^-1 at a wavelength of 2 μm.