[ME1] Silicon Nitride and Novel Material Waveguides

[ME1-4] Refractive Index Sensor Based on Few-mode Silicon-Nitride Micro-Ring Resonator

〇Minghui Liu, Lin Ma, Ciyuan Qiu, Zuyuan He (Shanghai Jiao Tong Univ., China)

Keywords:Photonic Integration

We propose refractive index sensor based on few-mode silicon-nitride micro-ring resonator by measuring the difference in resonant wavelength shifts of the fundamental and higher-order modes. In experiment, we achieved a sensitivity of about 91.79 nm/RIU.