OECC/PSC 2019

Presentation information

Oral Sessions

O5. Optical Passive Devices and Modules

[ME1] Silicon Nitride and Novel Material Waveguides

Mon. Jul 8, 2019 2:00 PM - 3:30 PM Room E (413, 4F, Fukuoka International Congress Center)

Presider: Enxiao Luan (University of British Columbia, Canada)

2:30 PM - 2:45 PM

[ME1-2] A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss

〇Philippe Helin, Andrea Firrincieli, Ashesh Ray Chaudhuri, Nga Pham, Silvia Lenci, Manuel Mannarino, Haris Osman (Imec, Belgium)

Keywords:Advanced Passive Devices, Planar lightwave circuits (PLC)

This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of layer thickness control; 1nm for a silicon nitride thickness of 400nm with low propagation loss 0.13dB/cm at 1520nm.

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