Short Oral Session

[LEDIA-P-07] Structural and Electrical Properties of AlN Films Prepared on Sapphire Substrates with Sputtering Technique

Yuya Sakurai¹, *Kohei Ueno¹, Kenjiro Uesugi², Hideto Miyake², Hiroshi Fujioka^1,3 (1. The University of Tokyo, 2. Mie University, 3. JST-ACCEL)