OPTICS & PHOTONICS International Congress 2019

Presentation information

OPTM2019

Oral Presentation

Oral Session 6

Wed. Apr 24, 2019 3:30 PM - 5:30 PM 213 (Pacifico Yokohama Conference Center)

4:30 PM - 4:50 PM

[OPTM-6-03] Spectroscopic Ellipsometry Study on Aluminium-Doped Zinc Oxide Thin Films Prepared via DC Magnetron Sputtering and HiPIMS.

Donyawan Chittinan1, Tossaporn Lertvanithphol2, Kittikhun Seawsakul3, Prayoon Songsiriritthigul3, Phitsanu Poolcharuansin4, Mati Horprathum2, *Prathan Buranasiri1 (1. King Mongkut's Institute of Technology Ladkrabang, 2. National Electronics and Computer Technology Center, National Science and Technology Development Agency , 3. Suranaree University of Technology, 4. Mahasarakham University)