OPTICS & PHOTONICS International Congress 2020

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LEDIA2020

Short Oral Presentaion

Short Presentation

Wed. Apr 22, 2020 11:00 AM - 12:21 PM 411+412 (Conference Center)

Session Chair: Hisashi Murakami(Tokyo University of Agriculture and Technology)

11:27 AM - 11:30 AM

[LEDIA6-10] Thermodynamic analysis of metalorganic vapor phase epitaxy of group-III sesquioxides

*Saori Matsugai1, Nami Tanaka1, Sakiko Yamanobe1, Nao Takekawa1, Ken Goto1, Yoshinao Kumagai1,2 (1. Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2. Institute of Global Innovation Research, Tokyo University of Agriculture and Technology)