Inductively Coupled Plasma Reactive Ion Etching of GaN Films Maintaining Surface Flatness for Surface Activated Bonding

Presentation information

LEDIA2020

Short Oral Presentaion

Wed. Apr 22, 2020 11:00 AM - 12:21 PM 411+412 (Conference Center)

Session Chair: Hisashi Murakami(Tokyo University of Agriculture and Technology)

11:30 AM - 11:33 AM

*Naoki Yokoyama¹, Ryo Tanabe¹, Takaya Morikawa¹, Yasufumi Fujiwara¹, Masahiro Uemukai¹, Tomoyuki Tanikawa¹, Ryuji Katayama¹ (1. Osaka University)