Poster Session

[LEDIAp-11] Inductively Coupled Plasma Reactive Ion Etching of GaN Films Maintaining Surface Flatness for Surface Activated Bonding

*Naoki Yokoyama¹, Ryo Tanabe¹, Takaya Morikawa¹, Yasufumi Fujiwara¹, Masahiro Uemukai¹, Tomoyuki Tanikawa¹, Ryuji Katayama¹ (1. Osaka University)