Design of a spectroscopic imaging ellipsometer

Presentation information

OPTM2020

Oral Presentation

Wed. Apr 22, 2020 12:50 PM - 3:30 PM 211 (Conference Center)

1:30 PM - 2:10 PM

*Lianhua Jin¹, Makoto Uehara¹, Takashi Iwao¹, Yuki Iizuka¹, Eiichi Kondoh¹, Bernard Gelloz² (1. Univ.Yamanashi, 2. Nagoya University,)