Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry

Presentation information

OPTM2020

Oral Presentation

Wed. Apr 22, 2020 12:50 PM - 3:30 PM 211 (Conference Center)

2:10 PM - 2:30 PM

*Daesuk Kim¹, Vamara Dembele¹, Inho Choi¹, Sukhyun Choi¹, Saeid Kheiryzadehkhanghah¹, Chung Song Kim¹ (1. Chonbuk National University)