Session 5

[OPTM5-03] Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry

*Daesuk Kim¹, Vamara Dembele¹, Inho Choi¹, Sukhyun Choi¹, Saeid Kheiryzadehkhanghah¹, Chung Song Kim¹ (1. Chonbuk National University)