Photoemission, absorption, scattering (3)

[LSC5-03(Invited)] Terahertz components fabricated by femtosecond laser processing

*Xi Yu¹, Dejun Liu², Verdad Canila Agulto³, Kensuke Miyajima¹, Makoto Nakajima³, Fumihiro Itoigawa⁴, Shingo Ono⁴ (1. Tokyo University of Science, 2. Shanghai Normal University, 3. Osaka University, 4. Nagoya Institute of Technology)

Femtosecond (fs) laser processing is being widely utilized for the research of micro and nano machining. Using fs laser processing, we realized a quarter-wavelength plate for Terahertz(THz) waves on a Zinc Oxide substrate. High-Q factor and polarization-independent quasi-bound states in the continuum were also achieved in the THz all-metal devices by this method. These fs laser-fabricated THz components were evaluated by both experiments and simulations.