Plasma Conference 2017

Presentation information

Poster Presentation

[21P] Poster 1

Tue. Nov 21, 2017 1:30 PM - 3:30 PM Poster (1F Exhibition Hall)

1:30 PM - 3:30 PM

[21P-79] Surface nanostructure formation and optical/electronic properties of black silicon obtained with He plasma exposure

*Shuichi TAKAMURA1, Yusuke KIKUCHI2, Tatsuya AOTA3, shiro MAENAKA3, Kazunobu FUJITA3, Yoshihiko UESUGI4, Hiroyuki IWATA5 (1. AIT, RIIT, 2. Univ. of Hyogo, 3. YUMEX, 4. kanazawa Univ., 5. AIT, Faculty of Eng.)

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