Surface nanostructure formation and optical/electronic properties of black silicon obtained with He plasma exposure

Shuichi TAKAMURA

1:30 PM - 3:30 PM

[21P-79] Surface nanostructure formation and optical/electronic properties of black silicon obtained with He plasma exposure

*Shuichi TAKAMURA¹, Yusuke KIKUCHI², Tatsuya AOTA³, shiro MAENAKA³, Kazunobu FUJITA³, Yoshihiko UESUGI⁴, Hiroyuki IWATA⁵ (1. AIT, RIIT, 2. Univ. of Hyogo, 3. YUMEX, 4. kanazawa Univ., 5. AIT, Faculty of Eng.)

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Presentation information

[21P] Poster 1

[21P-79] Surface nanostructure formation and optical/electronic properties of black silicon obtained with He plasma exposure

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