Plasma Conference 2017

Presentation information

Oral Presentation

[23Ga] Session 17

Thu. Nov 23, 2017 9:00 AM - 11:30 AM Room G (7F 702)

Chairperson: Shin KAJITA(Nagoya Univ.)

10:40 AM - 11:10 AM

[23Ga-06] A New Approach to Sputter Epitaxy for High-Quality Film Growth by Using Inverse SK Mode

*Naho Itagaki Itagaki1 (1. Graduate School of Information Science and Electrical Engineering, Kyushu Univ. )

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