Plasma Conference 2017

Presentation information

Oral Presentation

[24Da] Session 24

Fri. Nov 24, 2017 9:00 AM - 11:30 AM Room D (5F 503)

Chairperson: Haruhiko HIMURA(KIT)

9:50 AM - 10:10 AM

[24Da-02] Friction characteristics of diamond-like carbon film deposited by using high power impulse magnetron sputtering

*Atsushi Ishikawa1, Takayuki Ohta1, Akinori Oda2, Hiroyuki Hiroyuki3 (1. Department of Electrical and Electronics Engineering, Meijo Univ. , 2. Department of Electrical and Electronics Engineering, Chiba Institute of Technology, 3. Department of Mechanical Engineering, Gifu Univ. )

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