Diagnostics of high power impulse magnetron carbon sputtering using mass spectrometry

Presentation information

Oral Presentation

Fri. Nov 24, 2017 9:00 AM - 11:30 AM Room D (5F 503)

Chairperson: Haruhiko HIMURA(KIT)

9:30 AM - 9:50 AM

*Kazunori Iga¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1. Meijo Univ., 2. Chiba Inst. Technol., 3. Gifu Univ.)

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