SISPAD2023

Presentation information

Poster

[P] Poster Session

Thu. Sep 28, 2023 3:00 PM - 4:30 PM Meeting Room1

Chair: Shunsuke Koba (Kobe City Col. Tech.), Hideki Minari (Sony Semiconductor Solutions)

[P-10] Lateral Superlattice - A Possible Origin of the Large Leakage Current in Al1-xScxN

*Wanwang Yang1, Chenxi Yu1, Fei Liu1, Jinfeng Kang1 (1. Peking Univ.)

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