SISPAD2023

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Poster

[P] Poster Session

Thu. Sep 28, 2023 3:00 PM - 4:30 PM Meeting Room1

Chair: Shunsuke Koba (Kobe City Col. Tech.), Hideki Minari (Sony Semiconductor Solutions)

[P-13] Effect of Si Separator in Forksheet FETs on Device Characteristics Investigated by Using In-House TCAD Process Emulator and Device Simulator

*In Ki Kim1, Seung-Cheol Han1, Geonho Park1, Geon-Tae Jang1, Sung-Min Hong1 (1. Gwangju Institute of Science and Technology)

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