Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential

Hyunhak Jeong

4:00 PM - 4:20 PM

[Session_4-03] Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential

*Hyunhak Jeong¹, Byungjo Kim¹, Youjung Kim², Hanmei Choi², Suyoung Yoo¹, Sang Ki Nam¹ (1. Mechatronics Res., Samsung Electronics, 2. Semiconductor R&D Center, Samsung Electronics)

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Presentation information

[Session 4] Process Simulation

[Session_4-03] Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential

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