SNW2023 in 2023 Symposium on VLSI Technology and Circuits

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Oral Session

Ferroelecric Materials & Devices

[11] Ferroelectric devices

Mon. Jun 12, 2023 4:40 PM - 6:10 PM Shunjyu I (Shunjyu I)

Chair:Katsuhiko Nishiguchi(NTT Basic Research laboratories)

5:30 PM - 5:50 PM

[11-03] Investigation of HfO2/ZrO2 Superlattice Dielectric and High-k AlON Interfacial Layer on Ferroelectric FinFET

*Ming-Yueh Huang1, Siao-Cheng Yan1, Xin-Chan Zhong1, Chih-Siang Chang1, Chong-Jhe Sun1, Bo-An Chen1, Yi-Wen Lin1, Yung-Chun Wu1 (1. National Tsing Hua Univ. (Taiwan))

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