Vertically Stacked Ge Diamond-shape Nanowires GAAFET with Ferroelectric HZO

Bo-An Chen

Presentation information

Oral Session

Ferroelecric Materials & Devices

[11] Ferroelectric devices

Mon. Jun 12, 2023 4:40 PM - 6:10 PM Shunjyu I (Shunjyu I)

Chair:Katsuhiko Nishiguchi(NTT Basic Research laboratories)

5:50 PM - 6:10 PM

[11-04] Vertically Stacked Ge Diamond-shape Nanowires GAAFET with Ferroelectric HZO

*Bo-An Chen¹, Yi-Wen Lin¹, Hao-Hsiang Chang¹, Chih-Hsiang Chang¹, Ming-Yueh Huang¹, Xin-Chan Zhong¹, Siao-Cheng Yan¹, Chong-Jhe Sun¹, Fu-Ju Hou², Yung-Chun Wu¹ (1. National Tsing Hua Univ. (Taiwan), 2. Taiwan Semiconductor Research Inst. (Taiwan))

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.