[11] Ferroelectric devices

[11-04] Vertically Stacked Ge Diamond-shape Nanowires GAAFET with Ferroelectric HZO

*Bo-An Chen¹, Yi-Wen Lin¹, Hao-Hsiang Chang¹, Chih-Hsiang Chang¹, Ming-Yueh Huang¹, Xin-Chan Zhong¹, Siao-Cheng Yan¹, Chong-Jhe Sun¹, Fu-Ju Hou², Yung-Chun Wu¹ (1. National Tsing Hua Univ. (Taiwan), 2. Taiwan Semiconductor Research Inst. (Taiwan))