2017 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

04: Advanced Memory Technology

[D-2] Flash Memory

Wed. Sep 20, 2017 3:40 PM - 5:30 PM Hagi Conference Room (Conference building 2F, Sendai International Center)

Session Chair: K. Yamamoto(Toshiba Memory Corp.), Y. Jono(Micron Memory Japan Inc.)

3:40 PM - 4:10 PM

[D-2-01 (Invited)] FinFET Split-Gate MONOS for Embedded Flash in 16/14nm-node and Beyond

S. Tsuda1, Y. Kawashima1, K. Sonoda1, A. Yoshitomi1, T. Mihara1, S. Narumi1, M. Inoue1, S. Muranaka1, T. Maruyama1, T. Yamashita1, Y. Yamaguchi1, D. Hisamoto2 (1.Renesas Electronics Corp. (Japan), 2.Hitachi, Ltd. (Japan))

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