2017 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

01: Advanced LSI Processing & Materials Science

[K-4] Process Technology

Thu. Sep 21, 2017 2:00 PM - 3:30 PM Meeting Room 8 (Conference building 3F, Sendai International Center)

Session Chair: L. Grenouillet(CEA-Leti), G. Nakamura(Tokyo Electron Ltd.)

2:00 PM - 2:30 PM

[K-4-01 (Invited)] Ion implantation technology for advanced ULSI devices

T. Kuroi1 (1.Nissin Ion Equipment Co., Ltd. (Japan))

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