2017 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

01: Advanced LSI Processing & Materials Science

[K-5] Ferroelectric Material

Fri. Sep 22, 2017 9:30 AM - 10:55 AM Meeting Room 8 (Conference building 3F, Sendai International Center)

Session Chair: K. Kakushima(Tokyo Tech), O. Nakatsuka(Nagoya Univ.)

9:30 AM - 10:00 AM

[K-5-01 (Invited)] CMOS Compatible Ferroelectric Devices for Beyond 1X nm Technology Nodes

S. Müller1,H. Mulaosmanovic2, S. Slesazeck2, J. Müller3, T. Mikolajick2,4 (1.Ferroelectric Memory GmbH (Germany), 2.NaMLab gGmbH (Germany), 3.Fraunhofer IPMS (Germany), 4.IHM TU Dresden (Germany))

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