2018 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

01: Advanced CMOS: Material Fundamentals, Process Science and Device Physics

[C-1] Nanowire and Nanostructure-Based FET

Tue. Sep 11, 2018 2:00 PM - 3:15 PM Room 213 (School of Engineering Bldg.2 North Wing first floor)

Session Chair: T. Matsukawa(AIST), H. Arimura(IMEC)

2:00 PM - 2:30 PM

[C-1-01 (Invited)] Gate-All-Around Transistors Based on Vertically Stacked Si Nanowires: Recent Progress in CMOS Integration and in Advanced Inline Metrology

H. Mertens1, R. Ritzenthaler1, D. Mocuta1, N. Horiguchi1 (1. IMEC(Belgium))