2:00 PM - 2:30 PM
[C-1-01 (Invited)] Novel low k Dielectric materials for nano device interconnect technology
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Oral presentation
03: Interconnect / 3D Integrations / MEMS
Mon. Sep 28, 2020 2:00 PM - 3:30 PM Room C
Session Chair: Takeshi Nogami (IBM Research), Mayumi B. Takeyama (Kitami Inst. of Tech.)
2:00 PM - 2:30 PM
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