2022 International Conference on Solid State Devices and Materials

セッション情報

Oral Presentation

03: Interconnect / 3D Integrations / MEMS

[K-4] Design, Process, and Technology for High-performance Chiplet II/3D Integration and Advanced Packaging II

2022年9月28日(水) 09:00 〜 10:15 304 (3F)

Session Chair: Takeyasu Saito (Osaka Metropolitan Univ.), Xun Gu (ASM Japan)

09:30 〜 09:45

〇Yuki Susumago1, Tadaaki Hoshi1, Chang Liu1, Atushi Shinoda2, Hisashi Kino3, Tetsu Tanaka1,3, Takafumi Fukushima1,3 (1. Graduate School of Eng., Tohoku Univ. (Japan), 2. School of Eng., Tohoku Univ. (Japan), 3. Graduate School of Biomed. Eng., Tohoku Univ. (Japan))

Presentation style: Online
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