[A-9] Imaging Sensors and Detectors

[A-9-03] Wide-range Si-based non-contact temperature sensor using single-photon avalanche diodes

〇Yao Lun Liu¹, Sheng Di Lin¹, Chun Hsien Liu¹, Chun Hao Tsai¹, Ce Fang Shih¹, Jau Yang Wu¹, Chia Ming Tsai¹ (1. Univ. of National Yang Ming Chiao Tung (Taiwan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.A-9-03

A wide-range non-contact temperature sensor using a 64x128 pixels SPAD array with tunable macro-pixel has been demonstrated. The detectable temperature, defined by noise-equivalent temperature difference less than 1℃, from 230 ℃ to 1050 ℃ has been achieved. This work reveals the high potential of SPADs for radiometric temperature measurement.