[A-9] Imaging Sensors and Detectors

[A-9-06] Novel Process Optimization for Higher SNR of Small Pixel Sized CMOS Image Sensor with FDTI Structure.

〇Hyungeun Yoo¹, Junghyun Kim¹, Taesung Lee¹, Jonghoon Park¹, Yunki Lee¹, Bumsuk Kim¹, Jungchak Ahn¹ (1. Samsung electronics Co., Ltd (Korea))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.A-9-06

With increasing market demand of high resolution CMOS(Complementary Metal Oxide Semiconductor) image sensors, its unit pixel size has dramatically de-creased over the years. Therefore, Number of pho-tons entering unit pixel on an integration time have been decreased as unit pixel size decreases inevitably resulting in lower sensitivity of each pixel. Various technologies to increase the sensitivity have been researched and applied in recent image sensors with small sized pixel. In this paper, we introduce optimization method for higher sensitivity in CMOS image sensor and inevitable side ef-fects are successfully reduced.