Formation of High-Mobility InSb Films on Glass  by Sputtering and Rapid-Thermal Annealing

Takashi KAJIWARA

doi:https://doi.org/10.7567/SSDM.2022.B-5-05

Presentation information

Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[B-5] Advanced materials, Nanofabrication, and Thin Films I

Wed. Sep 28, 2022 10:45 AM - 12:00 PM 102 (1F)

Session Chair: Hirokazu Tatsuoka (Shizuoka Univ.), Yoriko Tominaga (Hiroshima Univ.)

11:45 AM - 12:00 PM

[B-5-05] Formation of High-Mobility InSb Films on Glass by Sputtering and Rapid-Thermal Annealing

Takashi KAJIWARA¹, Otokichi SHIMODA², Tatsuya OKADA², Charith Jayanada KOSWATHTHAGE², Takashi NOGUCHI², 〇Taizoh SADOH¹ (1. Kyushu Univ. (Japan), 2. Univ. of the Ryukyus (Japan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.B-5-05

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