[B-6] Advanced materials, Nanofabrication, and Thin Films II

[B-6-02] Surface Morphology Analysis of BiFeO₃ Film on DyScO₃ Substrate by RF Sputtering

〇Fuminobu Imaizumi¹, Kazuki Hisada, Rikuto Nakada (1. National Institute of Technology(KOSEN), Oyama College (Japan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.B-6-02

We investigated the formation of BiFeO3 films as a lead-free ferroelectric material on DyScO3 substrate. Experiments were performed to analyze the film formation process via the sputtering method, followed by post-annealing process. Consequently, a BiFeO3 film was formed with a single (001) orientation, and two types of bonds (FeO and Fe2O3) were observed.