2022 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

07: Organic / Molecular / Bio-electronics

[D-3] Advanced Technologies for Bio- and Chemical Sensing

Tue. Sep 27, 2022 4:15 PM - 6:00 PM 104 (1F)

Session Chair: Nicolas Clement (Univ. of Tokyo), Toshihiro Shimada (Hokkaido Univ.)

5:15 PM - 5:30 PM

[D-3-04] Na+ sensing and electrochemical noise measured with nano FinFET

〇Simon - Grall1, Yumi Gosselin1, Inès Muguet2, Laurent Jalabert1, Soo Hyeon Kim1, Guilhem Larrieu2, Nicolas Clement1 (1. Univ. of Tokyo/LIMMS-CNRS (Japan), 2. LAAS-CNRS (France))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.D-3-04

Ion-sensitive field effect transistor (ISFET) are commonly used as pH sensors, but the interactions of these devices with other ions remain poorly understood. Recently, a selective-layer-free approach has been introduced based on the non-Coulombic cation adsorption on the surface of a silicon nanotransistor. We show in this work that this approach can be extended to other devices architecture as illustrated with a micrometer-thick nano FinFET covered by Al2O3 oxide. Sensitivity to Na+ ion is demonstrated over a wide concentration range (6 orders of magnitude), with signal to noise ratio consistently over 150.

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