[D-3] Advanced Technologies for Bio- and Chemical Sensing

[D-3-04] Na⁺ sensing and electrochemical noise measured with nano FinFET

〇Simon - Grall¹, Yumi Gosselin¹, Inès Muguet², Laurent Jalabert¹, Soo Hyeon Kim¹, Guilhem Larrieu², Nicolas Clement¹ (1. Univ. of Tokyo/LIMMS-CNRS (Japan), 2. LAAS-CNRS (France))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.D-3-04

Ion-sensitive field effect transistor (ISFET) are commonly used as pH sensors, but the interactions of these devices with other ions remain poorly understood. Recently, a selective-layer-free approach has been introduced based on the non-Coulombic cation adsorption on the surface of a silicon nanotransistor. We show in this work that this approach can be extended to other devices architecture as illustrated with a micrometer-thick nano FinFET covered by Al2O3 oxide. Sensitivity to Na+ ion is demonstrated over a wide concentration range (6 orders of magnitude), with signal to noise ratio consistently over 150.